PECVD Tube Furnace (1200°C)
PECVD Tube Furnace (1200°C) delivers programmable thermal processing for heat treatment, calcination, sintering, and research.
Technical Specifications
| Max Temperature | 1200°C |
| Continuous Operating Temp | 1100°C |
| Tube Diameter | 40–100mm (custom) |
| Heating Zone Length | 300mm or 440mm |
| RF Power | 5–500W, 13.56 MHz ±0.005% |
| Gas Control | 3‑channel float or mass flow meters (optional) |
| Vacuum Capability | ≤5 Pa |
| Heating Element | HRE resistance wire |
| Chamber Material | Alumina ceramic fiber |
| Temperature Precision | ±1°C |
| Thermocouple | N type |
| Controller | Microprocessor PID (32 segments, programmable) |
| Power Supply | 220V (1.8–2.6KW) |
| Safety | Overheat, thermocouple‑break, and leakage protection |
📌 Applications
- calcination
- sintering
- annealing
- heat treatment
- ceramics
- battery materials
🏭 Industries
- materials
- metals
- ceramics
- batteries
- pharmaceuticals
- academia
⚙️ Use Cases
- powder processing
- catalyst treatment
- thermal cycling
- materials development
✅ Advantages
programmable temperature control and configurable heating versus basic laboratory furnaces
